Trajectory dependence of electronic energy-loss straggling at keV ion energies

Accurate knowledge of ion energy deposition in materials is imperative for a wealth scientific and technological applications. Here, the authors measure energy-loss straggling, i.e., distribution variance transmitted ions, $k\phantom{\rule{0}{0ex}}e\phantom{\rule{0}{0ex}}V$ ions H, He, B, Si membranes. Straggling exhibits significant trajectory dependence all ions. Studying velocity electronic straggling calculating transport cross sections, obtain strong evidence contributions electron-promotion events to loss at low velocities.